International Journal of Engineering Research in Electronics and Communication Engineering(IJERECE)

Monthly Journal for Electronics and Communication Engineering

Volume5,July 2018,

Topic : Design Optimization of Mems Based Piezoelectric Energy Harvester For Low Frequency Applications

Authors:Roohi Singh || Anil Arora

Abstract:Cantilever-based piezoelectric energy harvester received great demand in last recent years. These are mostly made of thin film technology and different configurations as unimorph and bimorph for sensor and actuator applications. In this paper, analysis and comparison of two widely used cantilever design in MEMS energy harvesting devices i.e. wide beam structure and narrow beam structure have been done. Aluminum Nitride (AIN) is chosen as a piezoelectric material due to its CMOS and biocompatibility. To study the output of the design, Finite Element Modeling was used. The power density obtained based on the volume of the structure was 14.8 μ W/cm3 for the wide beam structure and 0.10 μ W/cm3 for narrow beam structure individually. In selecting a device, bandwidth is also a vital parameter. An array of cantilever structure resulted in a bandwidth of 4 Hz for the wide beam structure and 8.1 Hz for narrow beam structure respectively..

Keywords: Energy harvesting, Micro-Electro-Mechanical System (MEMS), Piezoelectric unimorph, Finite Element Modeling (FEM), Aluminum Nitride (AIN), Energy Harvester (EH).

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DOI: 01.1617/vol5/iss7/pid16085


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Editor-in-Chief

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Dr.Zhongfu Tan
National Professor,
North China Electric Power University,
CHINA


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