Date of Publication :14th February 2018
Abstract: On-chip pentagonal fractal inductor with high inductance for terahertz (THz) frequency applications is presented in this paper. The frequency range of operation of proposed fractal inductor is in the sub-terahertz (sub-THz) band with self-resonant frequency of 335 GHz. The pentagonal fractal inductor is developed on silicon and SiO2, with copper as metal layer. Performance of fractal inductor is compared with planar inductor, fractal inductor shows better performance in terms of quality factor and moderate performance in terms of inductance(pH). On-chip area of the proposed inductor is 100µm×100µm. The simulation results using an electromagnetic simulator showed good agreement with the analysis.
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