Author : Siddarud Bannikoppa 1
Date of Publication :7th June 2015
Abstract: This paper discuss about the critical review on design of carbon nanotube based MEMS piezoresistive pressure sensors, use of different types of carbon nanotubes such as multi-walled carbon nanotubes (MWCNTs), single-walled carbon nanotubes (SWNTs) and vertically aligned carbon nanotubes (VANTs), sensing mechanism, applications, etc. The structural deformation of the piezoresistive nano structure will result in change of resistance. CNT is a sophisticated material with interesting electrical, mechanical, physical properties that can be used for fabrication of micro pressure sensors on different substrates, which may serve as alternative for silicon based pressure sensors when bio-compatibility and low cost applications are required.
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