Author : Veena V. Naik 1
Date of Publication :7th May 2016
Abstract: MEMS (Micro Electro Mechanical System) is technology of combining electronics and mechanical components integrated on chip to produce micron scale devices. MEMS can sense, process, actuate, compute and also communicate. The miniaturized system have better response time, faster analysis and diagnosis, good statistical results, improved automation possibilities with decreased risk and cost. The objective of this work is to model and simulate micro electromagnetic actuator driven by the electric current in the coil. The process of generating a magnetic flux (and hence force) by means of an electric current flowing through the coil can be called as electromagnetic excitation. Because of this force cantilever beam gets deflected. The work focuses on electromagnetic actuator modeling and simulation. Electromagnetic actuator has been modeled and simulated using COMSOL Metaphysics software.
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