Open Access Journal

ISSN : 2394-6849 (Online)

International Journal of Engineering Research in Electronics and Communication Engineering(IJERECE)

Monthly Journal for Electronics and Communication Engineering

Open Access Journal

International Journal of Engineering Research in Electronics and Communication Engineering(IJERECE)

Monthly Journal for Electronics and Communication Engineering

ISSN : 2394-6849 (Online)

Design and Simulation of SOI Based Piezoresistive Pressure Sensor

Author : Shruti Gudur 1 Ajayakumar C Kategeri 2 Kirankumar B 3 B G Sheeparamatti 4

Date of Publication :7th January 2017

Abstract: Amongst various pressure sensors, Piezoresistive type of pressure sensor is widely used because of its simple processing and fabrication. Hence in this paper a Piezoresistive pressure sensor is designed using SOI diaphragm.SOI material used to improve sensitivity and also used to achieve high reliability.The simulation is carried out using COMSOL/Multiphysics by considering the membrane geometry size, shape and location of piezoresistors.

Reference :

  1. [1]T. Praveen Raj et.al, ”Design of high sensitivity SOI Piezoresistive MEMS pressure sensor”, National MEMS design centre, Department of E and TC engineering, Annamalai University, Tamilnadu India.

    [2]Li Sainan et.al, ”A novel SOI pressure sensor for high temperature application”, Ministry of Education and Science technology on electronic test and Measurement Laboratory, Department of Electronic Science and technology, North university of china,Taiyuan030051,China.

    [3]M.Z.Shaik et.al, “Performance analysis of Piezoresistive MEMS for pressure measurement”, Journal of Theoretical and applied information technology@2005-2008. [4]U.Sampath kumar, N.Jagadeesh babu, ”Design and simulation of MEMS Piezoresistive pressure sensor to improve sensitivity”, IJIREEICE, Department Electronics and Instrumental Engineering, Gitam University, Vishakapattanam, India.


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DOI : 10.36647/ijerece/0000