Author : Shruti Gudur 1
Date of Publication :7th January 2017
Abstract: Amongst various pressure sensors, Piezoresistive type of pressure sensor is widely used because of its simple processing and fabrication. Hence in this paper a Piezoresistive pressure sensor is designed using SOI diaphragm.SOI material used to improve sensitivity and also used to achieve high reliability.The simulation is carried out using COMSOL/Multiphysics by considering the membrane geometry size, shape and location of piezoresistors.
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Li Sainan et.al, ”A novel SOI pressure sensor for high temperature application”, Ministry of Education and Science technology on electronic test and Measurement Laboratory, Department of Electronic Science and technology, North university of china,Taiyuan030051,China.
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