Author : Sudha R karbari 1
Date of Publication :7th February 2017
Abstract: The Micro-electronics mechanical system is a popular ever growing domain in microscopic devices. The size of the micro devices varies in the range of 0.001 to 0.1mm i.e., 1 to 100 micrometers. This paper focus on the detection of tuberculosis using micro devices. Here the simulation of unique and novel designs of micro-cantilever, polysilicon as a material. The simulated results are Eigen frequency, deflection, stress, strain, C-V characteristics, and capacitance of the cantilever.In this a microcantilever based sensing system is designed using COMSOL Multiphysics. The surface of the cantilever is coated with antbody layer. As the antigens of TB disease come in contact with the antibody layer of the microcantilever , deflection takes place. The amount of deflection is measured and read out capacitive.
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